Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8

A method is reported for fabricating truly three-dimensional micro-photonic structures directly onto the end face of an optical fiber using the cross-linkable resist SU-8. This epoxide-based material is well suited for micro-device fabrication because it is photo-processed as a solid and the cross-l...

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Veröffentlicht in:	Optics express 2011-11, Vol.19 (23), p.22910-22922
Hauptverfasser:	Williams, Henry E, Freppon, Daniel J, Kuebler, Stephen M, Rumpf, Raymond C, Melino, Marco A
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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