Fabrication of three-dimensional micro-photonic structures on the tip of optical fibers using SU-8
A method is reported for fabricating truly three-dimensional micro-photonic structures directly onto the end face of an optical fiber using the cross-linkable resist SU-8. This epoxide-based material is well suited for micro-device fabrication because it is photo-processed as a solid and the cross-l...
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Veröffentlicht in: | Optics express 2011-11, Vol.19 (23), p.22910-22922 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | A method is reported for fabricating truly three-dimensional micro-photonic structures directly onto the end face of an optical fiber using the cross-linkable resist SU-8. This epoxide-based material is well suited for micro-device fabrication because it is photo-processed as a solid and the cross-linked material is mechanically robust, chemically resistant, and optically transparent. Yet, procedures commonly used to process SU-8, particularly spin-coating, are impractical when the intended fabrication substrate is the end-face of an optical fiber. A melt-reflow process was developed to prepare optical fibers having SU-8 resin deposited at controlled thickness on the fiber end-face. Multi-photon direct laser writing was then used to fabricate various refractive lenses, a compound lens system, and a woodpile photonic crystal within the resin on the end-face of the optical fiber. Data are presented that show how the refractive lenses can be used to alter the output of the optical fiber. This work opens a new path to low-profile integrated photonic devices. |
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ISSN: | 1094-4087 1094-4087 |
DOI: | 10.1364/OE.19.022910 |