Properties of W incorporated diamond-like carbon films prepared by pulsed-laser deposition

This work provides the results for W incorporated diamond-like carbon films with thickness from 86 to 110 nm prepared by the pulsed-laser deposition method. Atomic force microscope (AFM), X-ray diffractometer (XRD), Raman spectroscopy and ellipsometry were used to characterize the films. The surface images indicated that the surface roughness (RMS) varied from 1.15 to 4.03 nm and was not sensitive to the W incorporation. α-W 2C and WC phase were found to form, which could be attributed to the W incorporation. The complex index of refraction almost linearly changed with the increase in W deposition time, while the extinction coefficient exhibited a complicated behavior. By the analysis of the Raman spectra, it was found that no obvious affection was induced after the W incorporation.