Combined model for growing mechanism of carbon nanotubes using HFCVD: effect of temperature and molecule gas diffusion
Growth of a dense forest of vertically-aligned carbon-nanotubes (VA-CNTs) by a hot filament chemical vapor deposition (HFCVD) method was investigated. The growth of very pure VA-CNTs via the bottom growth mechanism was extremely fast during the initial few minutes, but it slowed down and reached the...
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Veröffentlicht in: | Thin solid films 2009-04, Vol.517 (12), p.3562-3565 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Growth of a dense forest of vertically-aligned carbon-nanotubes (VA-CNTs) by a hot filament chemical vapor deposition (HFCVD) method was investigated. The growth of very pure VA-CNTs via the bottom growth mechanism was extremely fast during the initial few minutes, but it slowed down and reached the terminal height of a couple of millimeters. The different temporal variations of the VA-CNT height and growth rates corresponding to different growth stages indicated that a temperature-mediated thermodynamic model, precursor diffusion, and catalyst deactivation were responsible for the VA-CNT growth in respective stages. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/j.tsf.2009.01.066 |