Deformable Polymer Adaptive Optical Mirrors

The design, fabrication, and evaluation of deformable polymer-based micromirror devices for adaptive optic applications are described. For the mirror membranes, a freestanding polymer foil is used, which features key advantages with respect to its mechanical behavior when compared with the silicon-m...

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Veröffentlicht in:	Journal of microelectromechanical systems 2008-02, Vol.17 (1), p.11-19
Hauptverfasser:	Friese, C., Zappe, H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adaptive optics Applied sciences Biomembranes Circuit properties deformable mirror Deformation Design engineering Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Feasibility Foils (structural shapes) Formability Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated optics. Optical fibers and wave guides Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Membranes microelectromechanical devices micromachining Micromechanical devices and systems micromirror Mirrors Optical and optoelectronic circuits Optical device fabrication Optical devices Optical distortion Optical imaging Optical polymers Optical pulse shaping Optical sensors optimization methods Packaging Physics polymer technology Precision engineering, watch making SU-8
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Beschreibung
Zusammenfassung:	The design, fabrication, and evaluation of deformable polymer-based micromirror devices for adaptive optic applications are described. For the mirror membranes, a freestanding polymer foil is used, which features key advantages with respect to its mechanical behavior when compared with the silicon-micromachined membranes. The fabrication technology, mirror-membrane design, packaging, and operation in a feedback-controlled closed-loop system are outlined. The feasibility for the use of the prototypes in advanced adaptive optic systems is evaluated.
ISSN:	1057-7157 1941-0158
DOI:	10.1109/JMEMS.2007.913075