A capacitive tactile sensor array for surface texture discrimination

A capacitive tactile sensor array for surface texture discrimination

This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over th...

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Veröffentlicht in:Microelectronic engineering 2011-08, Vol.88 (8), p.1811-1813
Hauptverfasser: Muhammad, H.B., Recchiuto, C., Oddo, C.M., Beccai, L., Anthony, C.J., Adams, M.J., Carrozza, M.C., Ward, M.C.L.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Arrays
Biomimetic
Capacitive sensor
Detection
Electronics
Exact sciences and technology
Frequency spectrum
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
MEMS
Micro- and nanoelectromechanical devices (mems/nems)
Physics
Scanning
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Surface layer
Tactile
Tactile sensor
Texture
Texture recognition
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Beschreibung
Zusammenfassung:This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over the sensing array and assessing the frequency spectrum of the sensor outputs.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2011.01.045