Fabrication of transparent conductive W-doped SnO2 thin films on glass substrates using anatase TiO2 seed layers

Pulsed laser deposition was used to grow W‐doped SnO2 (WTO) thin films on glass substrates. By using 10‐nm‐thick polycrystalline anatase TiO2 seed layers formed on the glass substrates, the lowest resistivity of 3.5 × 10‐4 Ωcm, with a mobility of 84 cm2V‐1s‐1 and a carrier concentration of 2.1 × 102...

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Veröffentlicht in:	Physica status solidi. C 2011-02, Vol.8 (2), p.543-545
Hauptverfasser:	Nakao, Shoichiro, Yamada, Naoomi, Hitosugi, Taro, Hirose, Yasushi, Shimada, Toshihiro, Hasegawa, Tetsuya
Format:	Artikel
Sprache:	eng
Schlagworte:	Anatase Electrical resistivity Glass pulsed laser deposition seed layer Seeds Thin films Tin dioxide Tin oxides Titanium dioxide transparent conductive oxide W-doped SnO2
Online-Zugang:	Volltext
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