A novel method for acquiring large‐scale automated scanning electron microscope data

Summary Recent software and hardware advances in the field of electron backscatter diffraction have led to an increase in the rate of data acquisition. Combining automated stage movements with conventional beam control have allowed researchers to collect data from significantly larger areas of sampl...

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Veröffentlicht in:Journal of microscopy (Oxford) 2011-11, Vol.244 (2), p.181-186
Hauptverfasser: SHIVELEY, A.R., SHADE, P.A., PILCHAK, A.L., TILEY, J.S., KERNS, R.
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Sprache:eng
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Zusammenfassung:Summary Recent software and hardware advances in the field of electron backscatter diffraction have led to an increase in the rate of data acquisition. Combining automated stage movements with conventional beam control have allowed researchers to collect data from significantly larger areas of samples than was previously possible. This paper describes a LabVIEW™ and AutoIT© code which allows for increased flexibility compared to commercially available software. The source code for this software has been made available in the online version of this paper.
ISSN:0022-2720
1365-2818
DOI:10.1111/j.1365-2818.2011.03524.x