Neodymium-doped tantalum pentoxide waveguide lasers
The fabrication, spectroscopic properties, and laser performance of Nd/sup 3+/-doped Ta/sub 2/O/sub 5/ channel waveguide lasers are described. Lasing is obtained at both 1.066 and 1.375 /spl mu/m with threshold pump powers as low as 2.7 mW. The rib waveguides are reactive-ion-etched into Nd:Ta/sub 2...
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Veröffentlicht in: | IEEE journal of quantum electronics 2005-12, Vol.41 (12), p.1565-1573 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The fabrication, spectroscopic properties, and laser performance of Nd/sup 3+/-doped Ta/sub 2/O/sub 5/ channel waveguide lasers are described. Lasing is obtained at both 1.066 and 1.375 /spl mu/m with threshold pump powers as low as 2.7 mW. The rib waveguides are reactive-ion-etched into Nd:Ta/sub 2/O/sub 5/ layers formed by reactive magnetron sputtering. These high-index low-loss rare-earth-doped waveguides are fabricated on silicon substrates and offer the potential for integration with photonic crystal structures for compact optical circuits. |
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ISSN: | 0018-9197 1558-1713 |
DOI: | 10.1109/JQE.2005.858775 |