Modification of AlN thin films morphology and structure by temporally shaping of fs laser pulses used for deposition

We studied the effect of temporally pulse shaping upon the properties of thin layers synthesized by pulsed laser deposition with fs laser pulses generated by a Ti-sapphire laser source. We showed that the film morphology and structure can be gradually modified when applying mono-pulses of different...

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Veröffentlicht in:	Thin solid films 2011-07, Vol.519 (19), p.6381-6387
Hauptverfasser:	Ristoscu, C., Ghica, C., Papadopoulou, E.L., Socol, G., Gray, D., Mironov, B., Mihailescu, I.N., Fotakis, C.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum nitride Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition Exact sciences and technology Femto second lasers Laser deposition Laser pulse shape Lasers Materials science Methods of deposition of films and coatings film growth and epitaxy Morphology Nanoscale materials and structures: fabrication and characterization Nanostructured thin films Other semiconductors Other topics in nanoscale materials and structures Physics Pulsed laser deposition Specific materials Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Thin films Titanium
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Zusammenfassung:	We studied the effect of temporally pulse shaping upon the properties of thin layers synthesized by pulsed laser deposition with fs laser pulses generated by a Ti-sapphire laser source. We showed that the film morphology and structure can be gradually modified when applying mono-pulses of different duration or passing to a sequence of two pulses of different intensities.
ISSN:	0040-6090 1879-2731
DOI:	10.1016/j.tsf.2011.04.065