Effect of accelerated crucible rotation on the segregation of impurities in vertical Bridgman growth of multi-crystalline silicon

We have performed axisymmetric, transient simulations of the vertical Bridgman growth of mc-silicon to study the effect of the accelerated crucible rotation technique (ACRT) on the melt flow and impurity segregation. A solute transport model has been applied to predict the final segregation pattern...

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Veröffentlicht in:Journal of crystal growth 2011-03, Vol.318 (1), p.239-243
Hauptverfasser: Bellmann, M.P., Meese, E.A., Arnberg, L.
Format: Artikel
Sprache:eng
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Zusammenfassung:We have performed axisymmetric, transient simulations of the vertical Bridgman growth of mc-silicon to study the effect of the accelerated crucible rotation technique (ACRT) on the melt flow and impurity segregation. A solute transport model has been applied to predict the final segregation pattern of impurities in a circular ingot. The sinusoidal ACRT rotation cycle considered here suppresses mixing in the melt near the center, resulting in diffusion-limited mass transport. Therefore the radial impurity segregation is increased towards the center. The effect of increased radial segregation is intensified for low values of the Ekman time scale.
ISSN:0022-0248
1873-5002
DOI:10.1016/j.jcrysgro.2010.10.069