Magnetic induction machines integrated into bulk-micromachined silicon

This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials...

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Veröffentlicht in:	Journal of microelectromechanical systems 2006-04, Vol.15 (2), p.406-414
Hauptverfasser:	Arnold, D.P., Das, S., Cros, F., Zana, I., Allen, M.G., Lang, J.H.
Format:	Artikel
Sprache:	eng
Schlagworte:	AC generators Batteries Copper Design engineering Embedded structures Engines Exact sciences and technology Fabrication High speed Induction machines Instruments, apparatus, components and techniques common to several branches of physics and astronomy Iron Laboratories Magnetic induction Magnetic materials Mechanical instruments, equipment and techniques MEMS Microelectromechanical systems micromachining Micromechanical devices and systems Physics Power generation Rotors Silicon
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