Magnetic induction machines integrated into bulk-micromachined silicon

This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials...

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Veröffentlicht in:	Journal of microelectromechanical systems 2006-04, Vol.15 (2), p.406-414
Hauptverfasser:	Arnold, D.P., Das, S., Cros, F., Zana, I., Allen, M.G., Lang, J.H.
Format:	Artikel
Sprache:	eng
Schlagworte:	AC generators Batteries Copper Design engineering Embedded structures Engines Exact sciences and technology Fabrication High speed Induction machines Instruments, apparatus, components and techniques common to several branches of physics and astronomy Iron Laboratories Magnetic induction Magnetic materials Mechanical instruments, equipment and techniques MEMS Microelectromechanical systems micromachining Micromechanical devices and systems Physics Power generation Rotors Silicon
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Beschreibung
Zusammenfassung:	This paper presents the design, fabrication, and characterization of laminated, magnetic induction machines intended for high-speed, high-temperature, high-power-density, silicon-based microengine power generation systems. Innovative fabrication techniques were used to embed electroplated materials (Cu, Ni/sub 80/Fe/sub 20/, Co/sub 65/Fe/sub 18/Ni/sub 17/) within bulk-micromachined and fusion-bonded silicon to form the machine structures. The induction machines were characterized in motoring mode using tethered rotors, and exhibited a maximum measured torque of 2.5 /spl mu/N/spl middot/m.
ISSN:	1057-7157 1941-0158
DOI:	10.1109/JMEMS.2006.873951