Atomic force acoustic microscopy for quantitative nanomechanical characterization

Atomic force acoustic microscopy is an interesting measurement technique for characterization and mapping of local elastic properties of different materials, taking advantage of high lateral resolutions typical of scanning probe instruments. The present work discusses applicability of the technique and the main factors to be considered for exploitation of quantitative measurements. Particular attention is given to the influence of tips and to the role of calibration. Investigations and comparison with nanoindentation technique are eventually reported on different samples produced by means of plasma enhanced chemical vapour deposition technique (PECVD).