Hybrid numerical-experimental investigation of two-degree-of-freedom piezoelectric positioning actuator

New types of piezoelectric elements, made in the form of hemisphere piezoceramic transducers and aimed at the application in nanoresolution positioning devices on the plane (2 DOFs), are presented. Hemisphere piezoceramic transducers with specific excitation zones, realized by sectioning electrodes into symmetric parts, enable the generation of several vibration forms with controllable amplitudes and orientation. Hybrid numerical-experimental investigation of hemisphere piezoceramic actuators is presented. It includes combination, comparison and analyzes of experimental and numerical results for the explanation of transducer translational motion. Non-contact measurement PRISM system and COMSOL Multiphysics software were applied for the investigation.Original Abstract: Straipsnyje nagrinejamos naujo tipo pjezoelektrines pozicionavimo sistemos, pagamintos is pusrutulio formos pjezokeramikos, leidziancios pozicionuoti plokstumoje (du laisves laipsniai) dideliu tikslumu. Pusrutulio formos pjezokeramikos elektrodai suskaidyti i tris simetriskas dalis. Tai leidzia generuoti atitinkamu formu virpesius ir isgauti pozicionavimo sistemos kontroliuojama judejima, plokstumoje. Straipsnyje aprasomas pjezoelektriniu pozicionavimo sistemu skaitmeninis-eksperimentinis tyrimas. Ji sudaro eksperimentiniu ir skaitmeniniu rezultatu lyginimas ir analize, siekiant paaiskinti pozicionavimo sistemu veikimo principa. Tikslui igyvendinti naudojama nekontaktine holografines interferometrijos sistema PRISM ir baigtiniu elementiu pagrindu veikianti programine iranga "COMSOL Multiphysics".