Wide measurement range scanning heterodyne interferometer utilizing astigmatic position sensing scheme

A scanning heterodyne I/Q-interferometer scheme is proposed to overcome phase ambiguity caused by the periodic nature of its phase-dependent signal. A position sensing scheme using an astigmatic method in the confocal arrangement has been interfaced to the interferometer to retrieve the real phase v...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Optics letters 2011-08, Vol.36 (16), p.3112-3114
Hauptverfasser:	PARK, Youngkyu, KIM, Kyoung-Eop, KIM, Seong-Jin, PARK, June-Gyu, JOO, Young-Hun, BU HYUN SHIN, LEE, Seung-Yop, CHO, Kyuman
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Fundamental areas of phenomenology (including applications) Imaging and optical processing Instruments, apparatus, components and techniques common to several branches of physics and astronomy Interferometers Measurements common to several branches of physics and astronomy Metrology, measurements and laboratory procedures Optical instruments, equipment and techniques Optics Phase retrieval Physics Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements)
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!