Wide measurement range scanning heterodyne interferometer utilizing astigmatic position sensing scheme

A scanning heterodyne I/Q-interferometer scheme is proposed to overcome phase ambiguity caused by the periodic nature of its phase-dependent signal. A position sensing scheme using an astigmatic method in the confocal arrangement has been interfaced to the interferometer to retrieve the real phase v...

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Veröffentlicht in:	Optics letters 2011-08, Vol.36 (16), p.3112-3114
Hauptverfasser:	PARK, Youngkyu, KIM, Kyoung-Eop, KIM, Seong-Jin, PARK, June-Gyu, JOO, Young-Hun, BU HYUN SHIN, LEE, Seung-Yop, CHO, Kyuman
Format:	Artikel
Sprache:	eng
Schlagworte:	Exact sciences and technology Fundamental areas of phenomenology (including applications) Imaging and optical processing Instruments, apparatus, components and techniques common to several branches of physics and astronomy Interferometers Measurements common to several branches of physics and astronomy Metrology, measurements and laboratory procedures Optical instruments, equipment and techniques Optics Phase retrieval Physics Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements)
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Beschreibung
Zusammenfassung:	A scanning heterodyne I/Q-interferometer scheme is proposed to overcome phase ambiguity caused by the periodic nature of its phase-dependent signal. A position sensing scheme using an astigmatic method in the confocal arrangement has been interfaced to the interferometer to retrieve the real phase value during a scanning process. The experimental results show that the vertical measurement range can be expanded up to 16 μm. The potential of this interferometer on the scanning microscopy of a rough surface is discussed.
ISSN:	0146-9592 1539-4794
DOI:	10.1364/OL.36.003112