Top-down approach to fiber-top cantilevers

Top-down approach to fiber-top cantilevers

Taking inspiration from conventional top-down micromachining techniques, we have fabricated a low mass gold fiber-top cantilever via align-and-shine photolithography. The cantilever is characterized by measuring its resonance frequency and mechanical quality factor. Our results show that the device...

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Veröffentlicht in:Optics letters 2011-08, Vol.36 (15), p.2898-2900
Hauptverfasser: KHASHAYAR BABAEI GAVAN, RECTOR, Jan H, HEECK, Kier, CHAVAN, Dhwajal, GRUCA, Grzegorz, OOSTERKAMP, Tjerk H, LANNUZZI, Davide
Format: Artikel
Sprache:eng
Schlagworte:
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Microscopy, Electron
Microtechnology - methods
Optical Fibers
Optics
Physics
Silicon Dioxide - chemistry
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Beschreibung
Zusammenfassung:Taking inspiration from conventional top-down micromachining techniques, we have fabricated a low mass gold fiber-top cantilever via align-and-shine photolithography. The cantilever is characterized by measuring its resonance frequency and mechanical quality factor. Our results show that the device grants mass sensitivity comparable to that reported for similar standard cantilevers. This proof-of-concept paves the way to series production of highly sensitive fiber-top devices for remote detection of biochemical substances.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.36.002898