A Bio-Fluidic-Photonic Platform Based on Deep UV Modification of Polymers

We present a review of our work on deep UV (DUV) modification of methacrylate-based polymers. This technology serves as a platform for realizing planar and ridge waveguide-based devices, fluidic channels, and enables the patterning of living cells including neural cells in vitro. Details on the DUV...

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Veröffentlicht in:	IEEE journal of selected topics in quantum electronics 2007-03, Vol.13 (2), p.214-222
Hauptverfasser:	Rabus, D.G., Bruendel, M., Ichihashi, Y., Welle, A., Seger, R.A., Isaacson, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Biomedical optical imaging Channels Couplers Deep UV (DUV) Embossing Fluidics Integrated circuit technology Optical device fabrication Optical devices Optical polymers Optical refraction Optical sensors Optical variables control Optical waveguides Patterning photonic integrated circuits Platforms polymer Polymers Quantum electronics Ridges
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Beschreibung
Zusammenfassung:	We present a review of our work on deep UV (DUV) modification of methacrylate-based polymers. This technology serves as a platform for realizing planar and ridge waveguide-based devices, fluidic channels, and enables the patterning of living cells including neural cells in vitro. Details on the DUV chemistry and fabrication technologies including hot embossing of multimode interference couplers will be given
ISSN:	1077-260X 1558-4542
DOI:	10.1109/JSTQE.2007.892073