Rotatable broadband retarders for far-infrared spectroscopic ellipsometry
Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90...
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Veröffentlicht in: | Thin solid films 2011-02, Vol.519 (9), p.2698-2702 |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90°. Experimental characteristics of the rotatable retarders that utilize three- and four-bounce designs are compared with calculations. We discuss the effect of light focusing on the performance of these rotatable retarders. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/j.tsf.2010.12.057 |