Rotatable broadband retarders for far-infrared spectroscopic ellipsometry

Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90...

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Veröffentlicht in:Thin solid films 2011-02, Vol.519 (9), p.2698-2702
Hauptverfasser: Kang, T.D., Standard, E., Carr, G.L., Zhou, T., Kotelyanskii, M., Sirenko, A.A.
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Sprache:eng
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Zusammenfassung:Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90°. Experimental characteristics of the rotatable retarders that utilize three- and four-bounce designs are compared with calculations. We discuss the effect of light focusing on the performance of these rotatable retarders.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2010.12.057