Laser-textured silicon photodiode with broadband spectral response

A femtosecond-laser-textured Si photodetector is reported. Broadband spectral optical response is detected from UV to NIR. A quantum efficiency of greater than 80% from 490 nm to 780 nm has been achieved. The quantum efficiency at 245 nm is 62%, which is comparable to UV-enhanced Si photodiodes....

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Veröffentlicht in:	Appl. Opt 2011-06, Vol.50 (17), p.2508-2511
Hauptverfasser:	Li, Zhi, Nayak, Barada K, Iyengar, Vikram V, McIntosh, Dion, Zhou, Qiugui, Gupta, Mool C, Campbell, Joe C
Format:	Artikel
Sprache:	eng
Schlagworte:	solar (photovoltaic), solar (fuels), solid state lighting, charge transport, materials and chemistry by design, optics, synthesis (novel materials), synthesis (self-assembly), synthesis (scalable processing)
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	A femtosecond-laser-textured Si photodetector is reported. Broadband spectral optical response is detected from UV to NIR. A quantum efficiency of greater than 80% from 490 nm to 780 nm has been achieved. The quantum efficiency at 245 nm is 62%, which is comparable to UV-enhanced Si photodiodes. The bandwidth of a 250-μm-diameter device is 60 MHz.
ISSN:	0003-6935 2155-3165 1539-4522
DOI:	10.1364/AO.50.002508