Tensile measurement of single crystal gallium nitride nanowires on MEMS test stages
This paper reports direct tensile tests on n-type (Si-doped) gallium nitride single crystal nanowires 1 1 Contribution of NIST, an agency of the U.S. government, not subject to copyright. that were grown by nitrogen plasma-assisted molecular beam epitaxy and which are essentially free of defects and...
Gespeichert in:
Veröffentlicht in: | Sensors and actuators. A. Physical. 2011-04, Vol.166 (2), p.177-186 |
---|---|
Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | This paper reports direct tensile tests on n-type (Si-doped) gallium nitride single crystal nanowires
1
1
Contribution of NIST, an agency of the U.S. government, not subject to copyright.
that were grown by nitrogen plasma-assisted molecular beam epitaxy and which are essentially free of defects and residual strain. Nanowires were integrated with actuated, active microelectromechanical (MEMS) devices using dielectrophoresis-driven self-assembly and platinum-carbon clamps created using a gallium focused ion beam. For one nanowire, failure strain of 0.042
±
0.011 was found. Most nanowire specimens appeared to demonstrate tensile strength in the range of 4.0
±
1.7
GPa to 7.5
±
3.4
GPa. Failure modes included clamp failure, transverse (nanowire
c-plane) fractures, and insufficient force from the MEMS test actuator. |
---|---|
ISSN: | 0924-4247 1873-3069 |
DOI: | 10.1016/j.sna.2010.04.002 |