Tensile measurement of single crystal gallium nitride nanowires on MEMS test stages

This paper reports direct tensile tests on n-type (Si-doped) gallium nitride single crystal nanowires 1 1 Contribution of NIST, an agency of the U.S. government, not subject to copyright. that were grown by nitrogen plasma-assisted molecular beam epitaxy and which are essentially free of defects and...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2011-04, Vol.166 (2), p.177-186
Hauptverfasser: Brown, J.J., Baca, A.I., Bertness, K.A., Dikin, D.A., Ruoff, R.S., Bright, V.M.
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Sprache:eng
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Zusammenfassung:This paper reports direct tensile tests on n-type (Si-doped) gallium nitride single crystal nanowires 1 1 Contribution of NIST, an agency of the U.S. government, not subject to copyright. that were grown by nitrogen plasma-assisted molecular beam epitaxy and which are essentially free of defects and residual strain. Nanowires were integrated with actuated, active microelectromechanical (MEMS) devices using dielectrophoresis-driven self-assembly and platinum-carbon clamps created using a gallium focused ion beam. For one nanowire, failure strain of 0.042 ± 0.011 was found. Most nanowire specimens appeared to demonstrate tensile strength in the range of 4.0 ± 1.7 GPa to 7.5 ± 3.4 GPa. Failure modes included clamp failure, transverse (nanowire c-plane) fractures, and insufficient force from the MEMS test actuator.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2010.04.002