Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle
A novel formulation for thick-film graphite sacrificial pastes is studied in this paper. It is composed of coarse graphite powder (grain size: 25 μm), dispersed in a vehicle consisting of polyvinyl alcohol (PVA) dissolved in a propylene glycol (PG)–glycerol (G)–water mix, which is not aggressive to...
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| Veröffentlicht in: | Microelectronics and reliability 2011-04, Vol.51 (4), p.805-811 |
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| container_title | Microelectronics and reliability |
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| creator | Malecha, Karol Maeder, Thomas Jacq, Caroline Ryser, Peter |
| description | A novel formulation for thick-film graphite sacrificial pastes is studied in this paper. It is composed of coarse graphite powder (grain size: 25
μm), dispersed in a vehicle consisting of polyvinyl alcohol (PVA) dissolved in a propylene glycol (PG)–glycerol (G)–water mix, which is not aggressive to thin LTCC sheets. The presented sacrificial paste has been successfully applied for fabrication of thin ( |
| doi_str_mv | 10.1016/j.microrel.2010.11.009 |
| format | Article |
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μm), dispersed in a vehicle consisting of polyvinyl alcohol (PVA) dissolved in a propylene glycol (PG)–glycerol (G)–water mix, which is not aggressive to thin LTCC sheets. The presented sacrificial paste has been successfully applied for fabrication of thin (<50
μm) membranes and microchannels in low temperature co-fired ceramics (LTCC) substrate. The properties of the graphite-based paste have been examined using thermo-gravimetric analysis (TGA), differential thermo-gravimetric (DTG) and differential thermal analysis (DTA). The obtained membranes and microchannels have been investigated using scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX) and optical profile measurements gauge.</description><identifier>ISSN: 0026-2714</identifier><identifier>EISSN: 1872-941X</identifier><identifier>DOI: 10.1016/j.microrel.2010.11.009</identifier><identifier>CODEN: MCRLAS</identifier><language>eng</language><publisher>Kidlington: Elsevier Ltd</publisher><subject>Applied sciences ; Ceramics ; Differential thermal analysis ; Electronics ; Exact sciences and technology ; Graphite ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Materials ; Membranes ; Microchannels ; Pastes ; Physics ; Polyvinyl alcohols ; Scanning electron microscopy ; Scanning probe microscopes, components and techniques ; Vehicles</subject><ispartof>Microelectronics and reliability, 2011-04, Vol.51 (4), p.805-811</ispartof><rights>2010 Elsevier Ltd</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c422t-947bcdf7739d59ba3488f9d470dd83fd4cca0d1527a2863d34474ecb0908efc13</citedby><cites>FETCH-LOGICAL-c422t-947bcdf7739d59ba3488f9d470dd83fd4cca0d1527a2863d34474ecb0908efc13</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.microrel.2010.11.009$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>315,781,785,3551,27926,27927,45997</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=23942229$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Malecha, Karol</creatorcontrib><creatorcontrib>Maeder, Thomas</creatorcontrib><creatorcontrib>Jacq, Caroline</creatorcontrib><creatorcontrib>Ryser, Peter</creatorcontrib><title>Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle</title><title>Microelectronics and reliability</title><description>A novel formulation for thick-film graphite sacrificial pastes is studied in this paper. It is composed of coarse graphite powder (grain size: 25
μm), dispersed in a vehicle consisting of polyvinyl alcohol (PVA) dissolved in a propylene glycol (PG)–glycerol (G)–water mix, which is not aggressive to thin LTCC sheets. The presented sacrificial paste has been successfully applied for fabrication of thin (<50
μm) membranes and microchannels in low temperature co-fired ceramics (LTCC) substrate. The properties of the graphite-based paste have been examined using thermo-gravimetric analysis (TGA), differential thermo-gravimetric (DTG) and differential thermal analysis (DTA). The obtained membranes and microchannels have been investigated using scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX) and optical profile measurements gauge.</description><subject>Applied sciences</subject><subject>Ceramics</subject><subject>Differential thermal analysis</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Graphite</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Materials</subject><subject>Membranes</subject><subject>Microchannels</subject><subject>Pastes</subject><subject>Physics</subject><subject>Polyvinyl alcohols</subject><subject>Scanning electron microscopy</subject><subject>Scanning probe microscopes, components and techniques</subject><subject>Vehicles</subject><issn>0026-2714</issn><issn>1872-941X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNqFUcuOEzEQHCGQCAu_gHxBwGGC7XHmcWMVLQ8p0q7EgrhZTrudOHLGg-1JlBv_wJG_2y_Bs1m4cmm3StVdrq6ieMnonFFWv9vN9xaCD-jmnE4gm1PaPSpmrG142Qn2_XExo5TXJW-YeFo8i3FHKW0oY7Pi95cURkhjUMn6nnhD0haJ80eScD9ghseABHxpbEBNICNZLZI3q9vl8i0Zo-03pPcHdCQqCNZYsMqRTVDD1iYkg4q5Hm3akptvl3c_fw3BDyeHPZKNO4F3GZoaDPftUSUM5IBbCw6fF0-MchFfPLwXxdcPV7fLT-Xq-uPn5eWqBMF5yg6bNWjTNFWnF91aVaJtTadFQ7VuK6MFgKKaLXijeFtXuhKiEQhr2tEWDbDqonh93pv_9mPEmOTeRkDnVI9-jLKtu7YSC15nZn1m5nvHGNDIIdi9CifJqJzCkDv5Nww5hSEZkzmMPPjqQUJFUM4E1YON_6Z51WUrfOK9P_Mw-z1YDDKCxR5Q5_NDktrb_0n9ATYmqlo</recordid><startdate>20110401</startdate><enddate>20110401</enddate><creator>Malecha, Karol</creator><creator>Maeder, Thomas</creator><creator>Jacq, Caroline</creator><creator>Ryser, Peter</creator><general>Elsevier Ltd</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7SP</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20110401</creationdate><title>Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle</title><author>Malecha, Karol ; Maeder, Thomas ; Jacq, Caroline ; Ryser, Peter</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c422t-947bcdf7739d59ba3488f9d470dd83fd4cca0d1527a2863d34474ecb0908efc13</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Applied sciences</topic><topic>Ceramics</topic><topic>Differential thermal analysis</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Graphite</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Materials</topic><topic>Membranes</topic><topic>Microchannels</topic><topic>Pastes</topic><topic>Physics</topic><topic>Polyvinyl alcohols</topic><topic>Scanning electron microscopy</topic><topic>Scanning probe microscopes, components and techniques</topic><topic>Vehicles</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Malecha, Karol</creatorcontrib><creatorcontrib>Maeder, Thomas</creatorcontrib><creatorcontrib>Jacq, Caroline</creatorcontrib><creatorcontrib>Ryser, Peter</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Microelectronics and reliability</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Malecha, Karol</au><au>Maeder, Thomas</au><au>Jacq, Caroline</au><au>Ryser, Peter</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle</atitle><jtitle>Microelectronics and reliability</jtitle><date>2011-04-01</date><risdate>2011</risdate><volume>51</volume><issue>4</issue><spage>805</spage><epage>811</epage><pages>805-811</pages><issn>0026-2714</issn><eissn>1872-941X</eissn><coden>MCRLAS</coden><abstract>A novel formulation for thick-film graphite sacrificial pastes is studied in this paper. It is composed of coarse graphite powder (grain size: 25
μm), dispersed in a vehicle consisting of polyvinyl alcohol (PVA) dissolved in a propylene glycol (PG)–glycerol (G)–water mix, which is not aggressive to thin LTCC sheets. The presented sacrificial paste has been successfully applied for fabrication of thin (<50
μm) membranes and microchannels in low temperature co-fired ceramics (LTCC) substrate. The properties of the graphite-based paste have been examined using thermo-gravimetric analysis (TGA), differential thermo-gravimetric (DTG) and differential thermal analysis (DTA). The obtained membranes and microchannels have been investigated using scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX) and optical profile measurements gauge.</abstract><cop>Kidlington</cop><pub>Elsevier Ltd</pub><doi>10.1016/j.microrel.2010.11.009</doi><tpages>7</tpages><oa>free_for_read</oa></addata></record> |
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| subjects | Applied sciences Ceramics Differential thermal analysis Electronics Exact sciences and technology Graphite Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials Membranes Microchannels Pastes Physics Polyvinyl alcohols Scanning electron microscopy Scanning probe microscopes, components and techniques Vehicles |
| title | Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle |
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