Structuration of the low temperature co-fired ceramics (LTCC) using novel sacrificial graphite paste with PVA–propylene glycol–glycerol–water vehicle

A novel formulation for thick-film graphite sacrificial pastes is studied in this paper. It is composed of coarse graphite powder (grain size: 25 μm), dispersed in a vehicle consisting of polyvinyl alcohol (PVA) dissolved in a propylene glycol (PG)–glycerol (G)–water mix, which is not aggressive to...

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Veröffentlicht in:	Microelectronics and reliability 2011-04, Vol.51 (4), p.805-811
Hauptverfasser:	Malecha, Karol, Maeder, Thomas, Jacq, Caroline, Ryser, Peter
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Ceramics Differential thermal analysis Electronics Exact sciences and technology Graphite Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials Membranes Microchannels Pastes Physics Polyvinyl alcohols Scanning electron microscopy Scanning probe microscopes, components and techniques Vehicles
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Zusammenfassung:	A novel formulation for thick-film graphite sacrificial pastes is studied in this paper. It is composed of coarse graphite powder (grain size: 25 μm), dispersed in a vehicle consisting of polyvinyl alcohol (PVA) dissolved in a propylene glycol (PG)–glycerol (G)–water mix, which is not aggressive to thin LTCC sheets. The presented sacrificial paste has been successfully applied for fabrication of thin (
ISSN:	0026-2714 1872-941X
DOI:	10.1016/j.microrel.2010.11.009