Depth measurement of the periodic grooved reflectors of surface acoustic waves using the laser probing

An optical method for depth measurement of the periodic grooved structures that serve as reflectors of surface acoustic waves (SAWs) is presented and analyzed. The method is based on the diffraction of the laser beam on a system of the SAW reflection elements. The measurement method is theoretically...

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Veröffentlicht in:	Journal of communications technology & electronics 2011-02, Vol.56 (2), p.220-225
Hauptverfasser:	Komotskii, V. A., Sokolov, Yu. M., Basistyi, E. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analysis Communications Engineering Communications technology Depth measurement Diffraction Electronics Engineering Grooved Investigations Lasers Measurement Measurement methods Measurement techniques Measuring instruments Mirrors Networks Physical Processes in Electron Devices Radiation Reflection Reflectors Saws Studies Surface acoustic waves
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Beschreibung
Zusammenfassung:	An optical method for depth measurement of the periodic grooved structures that serve as reflectors of surface acoustic waves (SAWs) is presented and analyzed. The method is based on the diffraction of the laser beam on a system of the SAW reflection elements. The measurement method is theoretically validated, and the experimental results are presented.
ISSN:	1064-2269 1555-6557
DOI:	10.1134/S1064226910121125