Angular position device with 2D low-noise Hall microsensor

A novel position device for full 0–360° contactless wear-free angle measurement has been developed. A CMOS 2D parallel-field Hall microsensor with sensitivity 19 V/AT along the X- and Y-channels and strongly reduced (at least 60 times) 1/ f noise has been applied for the first time. This is accomplished by in-plane chip location of the output contacts outside the current-flow zone. An original magnetic actuating system has been used where double flux is achieved by connecting the repulsive poles of two permanent semi-ring shaped magnets. The total angular accuracy of the laboratory setup of this positioning instrument is better than ±2–3° over the range of 360°.