Thermal and stress studies of normal incidence Mo/B4C multilayers for a 6.7 nm wavelength
Wavelength, reflectance, and stress stability of Mo/B(4)C multilayers were studied as a function of postdeposition annealing up to 900 °C. These multilayers are of interest as normal incidence coatings for wavelengths above the boron K-absorption edge. Mo/B(4)C multilayers deposited at low sputterin...
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| Veröffentlicht in: | Applied optics. Optical technology and biomedical optics 2011-04, Vol.50 (11), p.1610-1619 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | Wavelength, reflectance, and stress stability of Mo/B(4)C multilayers were studied as a function of postdeposition annealing up to 900 °C. These multilayers are of interest as normal incidence coatings for wavelengths above the boron K-absorption edge. Mo/B(4)C multilayers deposited at low sputtering pressure have high compressive stress. Zero stress can be achieved at 360 °C-370 °C, but annealing at |
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| ISSN: | 2155-3165 1539-4522 |
| DOI: | 10.1364/AO.50.001610 |