Micromechanically tuned ring resonator in silicon on insulator

Micromechanically tuned ring resonator in silicon on insulator

We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Optics letters 2011-04, Vol.36 (7), p.1047-1049
Hauptverfasser: KAUPPINEN, Lasse J, ABDULLA, Shahina M. C, DIJKSTRA, Meindert, DE BOER, Meint J, BERENSCHOT, Erwin, KRIJNEN, Gijs J. M, POLLNAU, Markus, DE RIDDER, Rene M
Format: Artikel
Sprache:eng
Schlagworte:
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Optics
Physics
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:We demonstrate a monolithically integrated micromechano-optical device where the resonance wavelength of a silicon ring resonator is tuned by perturbing the evanescent field with an electrostatically actuated silicon nitride microcantilever. The resonance wavelength can be tuned over 125 pm.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.36.001047