Templated Solid-State Dewetting to Controllably Produce Complex Patterns

Templated formation of complex patterns via solid‐state dewetting is demonstrated. Thin films often dewet from their substrates when they are heated, even while remaining in the solid state throughout the process. It is shown that solid‐state dewetting of epitaxial films can be templated through lithographic pre‐patterning, so as to reproducibly form complex structures with sub lithographic feature sizes.