Piezoelectric circular microdiaphragm based pressure sensors

Piezoelectric circular microdiaphragm based pressure sensors

Pressure influences on the vibration characteristics of piezoelectric circular microdiaphragm based pressure sensors are investigated theoretically and experimentally. It was demonstrated that only Bessel function of zero order, m = 0, participates in the vibration modes of the microdiaphragm symmet...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2010-09, Vol.163 (1), p.32-36
Hauptverfasser: Olfatnia, M., Xu, T., Miao, J.M., Ong, L.S., Jing, X.M., Norford, L.
Format: Artikel
Sprache:eng
Schlagworte:
Actuators
Bessel functions
Microdiaphragm
Piezoelectric
Piezoelectricity
Pressure
Pressure sensors
Sol gel process
Thin films
Vibration
Vibration mode
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Zusammenfassung:Pressure influences on the vibration characteristics of piezoelectric circular microdiaphragm based pressure sensors are investigated theoretically and experimentally. It was demonstrated that only Bessel function of zero order, m = 0, participates in the vibration modes of the microdiaphragm symmetrically loaded by pressure. The piezoelectric circular microdiaphragm was fabricated by combining sol–gel PZT thin film and MEMS technology. A high value of pressure sensitivity, as high as 280 Hz/mbar, has been achieved; this value is 2.43 times higher than the currently reported sensitivity (i.e., 115 Hz/mbar) in the literature.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2010.06.016