A primary standard equipment for measuring roughness parameters in the range from nanometers to millimeters

A primary standard equipment for measuring roughness parameters in the range from nanometers to millimeters

Descriptions are given of a primary-standard interference equipment and a computer program for measuring roughness parameters ranging from nanometers to millimeters.[PUBLICATION ABSTRACT]

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Bibliographische Detailangaben
Veröffentlicht in:Measurement techniques 2007-11, Vol.50 (11), p.1143-1148
Hauptverfasser: Kupko, V S, Lukin, I V, Risto, V A, Kovshov, S B, Kosenko, O A
Format: Artikel
Sprache:eng
Schlagworte:
Computer programs
Descriptions
Interference
R&D
Research & development
Roughness
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Beschreibung
Zusammenfassung:Descriptions are given of a primary-standard interference equipment and a computer program for measuring roughness parameters ranging from nanometers to millimeters.[PUBLICATION ABSTRACT]
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-007-0213-1