Laser interferometer with a high-resolution optical microscope for measuring small line scales

Laser interferometer with a high-resolution optical microscope for measuring small line scales

The optical train of an interferometer to certify small-scale measures in the range 1-200 μm with a high-resolution modulation optical microscope for sighting the lines on the measure is described. The circuit of a interference-fringe recording unit is presented. Some results of line scale measureme...

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Veröffentlicht in:Measurement techniques 1997-09, Vol.40 (9), p.852-855
Hauptverfasser: Abramova, L. Yu, Baratov, V. M., Fedorin, V. L., Khavinson, L. F.
Format: Artikel
Sprache:eng
Schlagworte:
Circuits
Interferometers
Lasers
Microscopes
Modulation
Optical microscopes
Recording
Trains
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Zusammenfassung:The optical train of an interferometer to certify small-scale measures in the range 1-200 μm with a high-resolution modulation optical microscope for sighting the lines on the measure is described. The circuit of a interference-fringe recording unit is presented. Some results of line scale measurements are reported.[PUBLICATION ABSTRACT]
ISSN:0543-1972
1573-8906
DOI:10.1007/BF02504491