Interferometer errors due to the presence of fringes

Phase-shifting interferometry permits analysis of complex interferograms. However, the measurement accuracy is reduced as the number of fringes is increased. The wave-front from a defocused spherical surface is used to demonstrate this degradation for several different transmission reference objecti...

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Veröffentlicht in:Applied Optics 1996-12, Vol.35 (34), p.6826-6828
Hauptverfasser: Lowman, A E, Greivenkamp, J E
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
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Zusammenfassung:Phase-shifting interferometry permits analysis of complex interferograms. However, the measurement accuracy is reduced as the number of fringes is increased. The wave-front from a defocused spherical surface is used to demonstrate this degradation for several different transmission reference objectives.
ISSN:1559-128X
0003-6935
1539-4522
DOI:10.1364/AO.35.006826