High-Throughput Method for the Impedance Spectroscopic Characterization of Resistive Gas Sensors

A combinatorial work flow for the rapid synthesis and testing of thick oxide films for the development of new gas sensors with improved sensitivity and selectivity involves the synthesis and deposition of mixed‐oxide films of variable composition. The library is based on the sol–gel synthesis of mix...

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Veröffentlicht in:Angewandte Chemie International Edition 2004-01, Vol.43 (6), p.752-754
Hauptverfasser: Frantzen, Andreas, Scheidtmann, Jens, Frenzer, Gerald, Maier, Wilhelm F., Jockel, Jörg, Brinz, Thomas, Sanders, Daniel, Simon, Ulrich
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Sprache:eng
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Zusammenfassung:A combinatorial work flow for the rapid synthesis and testing of thick oxide films for the development of new gas sensors with improved sensitivity and selectivity involves the synthesis and deposition of mixed‐oxide films of variable composition. The library is based on the sol–gel synthesis of mixed oxides on an array of 8×8 interdigitated electrodes. For the characterization of the sensor arrays, test gas sequences and sensor temperatures were varied.
ISSN:1433-7851
1521-3773
DOI:10.1002/anie.200352424