Synthesis of cubic silicon nitride
Silicon nitride (Si3N4) is used in a variety of important technological applications. The high fracture toughness, hardness and wear resistance of Si3N4-based ceramics are exploited in cutting tools and anti-friction bearings; in electronic applications, Si3N4 is used as an insulating, masking and p...
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Veröffentlicht in: | Nature (London) 1999-07, Vol.400 (6742), p.340-342 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Silicon nitride (Si3N4) is used in a variety of important technological applications. The high fracture toughness, hardness and wear resistance of Si3N4-based ceramics are exploited in cutting tools and anti-friction bearings; in electronic applications, Si3N4 is used as an insulating, masking and passivating material. Two polymorphs of silicon nitride are known, both of hexagonal structure: α- and β-Si3N4. Here we report the synthesis of a third polymorph of silicon nitride, which has a cubic spinel structure. This new phase, c-Si3N4, is formed at pressures above 15 GPa and temperatures exceeding 2,000 K, yet persists metastably in air at ambient pressure to at least 700 K. First-principles calculations of the properties of this phase suggest that the hardness of c-Si3N4 should be comparable to that of the hardest known oxide (stishovite, a high-pressure phase of SiO2), and significantly greater than the hardness of the two hexagonal polymorphs. |
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ISSN: | 0028-0836 1476-4687 |
DOI: | 10.1038/22493 |