V-doping effects on ferroelectric properties of K0.5Bi4.5Ti4O15 thin films

V-doped K0.5Bi4.5Ti4O15 (K0.5Bi4.5 a x/3Ti4 a x V x O15, KBTiV-x, x =0.00, 0.01, 0.03, and 0.05) thin films were prepared on a Pt(111)/Ti/SiO2/Si(100) substrate by a chemical solution deposition method. The thin films were annealed by using a rapid thermal annealing process at 750AC for 3min in an o...

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Veröffentlicht in:Thin solid films 2010-09, Vol.518 (22), p.6514-6517
Hauptverfasser: JIN WON KIM, DO, Dalhyun, SANG SU KIM
Format: Artikel
Sprache:eng
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Zusammenfassung:V-doped K0.5Bi4.5Ti4O15 (K0.5Bi4.5 a x/3Ti4 a x V x O15, KBTiV-x, x =0.00, 0.01, 0.03, and 0.05) thin films were prepared on a Pt(111)/Ti/SiO2/Si(100) substrate by a chemical solution deposition method. The thin films were annealed by using a rapid thermal annealing process at 750AC for 3min in an oxygen atmosphere. Among them, KBTiV-0.03 thin film exhibited the most outstanding electrical properties. The value of remnant polarization (2P r ) was 75I14C/cm2 at an applied electric field of 366kV/cm. The leakage current density of the thin film capacitor was 5.01A-10a 8 at 100kV/cm, which is approximately one order of magnitude lower than that of pure K0.5Bi4.5Ti4O15 thin film capacitor. We found that V doping is an effective method for improving the ferroelectric properties of K0.5Bi4.5Ti4O15 thin film.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2010.02.001