A 0.13 mu hbox m SiGe BiCMOS Technology Featuring f T /f max of 240/330 GHz and Gate Delays Below 3 ps

A 0.13 mu hbox m SiGe BiCMOS technology for millimeter-wave applications is presented. This technology features high-speed HBTs with peak transit frequencies f T of 240 GHz, maximum oscillation frequencies f max of 330 GHz, and breakdown voltages rm BV rm CEO of 1.7 V along with high-voltage HBTs (...

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Veröffentlicht in:IEEE journal of solid-state circuits 2010-09, Vol.45 (9), p.1678-1686
Hauptverfasser: Rucker, Holger, Heinemann, Bernd, Winkler, Wolfgang, Barth, R, Borngraber, J, Drews, J, Fischer, Gerhard G, Fox, Alexander, Grabolla, Thomas, Haak, U, Knoll, Dieter, Korndorfer, Falk, Mai, Andreas, Marschmeyer, Steffen, Schley, P, Schmidt, D, Schmidt, J, Schubert, Markus Andreas, Schulz, K, Tillack, Bernd, Wolansky, D, Yamamoto, Yuji
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container_end_page 1686
container_issue 9
container_start_page 1678
container_title IEEE journal of solid-state circuits
container_volume 45
creator Rucker, Holger
Heinemann, Bernd
Winkler, Wolfgang
Barth, R
Borngraber, J
Drews, J
Fischer, Gerhard G
Fox, Alexander
Grabolla, Thomas
Haak, U
Knoll, Dieter
Korndorfer, Falk
Mai, Andreas
Marschmeyer, Steffen
Schley, P
Schmidt, D
Schmidt, J
Schubert, Markus Andreas
Schulz, K
Tillack, Bernd
Wolansky, D
Yamamoto, Yuji
description A 0.13 mu hbox m SiGe BiCMOS technology for millimeter-wave applications is presented. This technology features high-speed HBTs with peak transit frequencies f T of 240 GHz, maximum oscillation frequencies f max of 330 GHz, and breakdown voltages rm BV rm CEO of 1.7 V along with high-voltage HBTs ( f T = 50 ~ hbox GHz , f max = 130 ~ hbox GHz , rm BV rm CEO = 3.7 ~ hbox V ) integrated in a dual gate oxide RF-CMOS process. Ring oscillator gate delays of 2.9 ps, low-noise amplifiers for 122 GHz, and LC oscillators with fundamental-mode oscillation frequencies above 200 GHz are demonstrated.
doi_str_mv 10.1109/JSSC.2010.2051475
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1558-173X
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source IEEE Electronic Library (IEL)
subjects Delay
Electric potential
Gates
High speed
Oscillations
Oscillators
Oxides
Silicon germanides
Voltage
title A 0.13 mu hbox m SiGe BiCMOS Technology Featuring f T /f max of 240/330 GHz and Gate Delays Below 3 ps
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