High Performance and Stability of Double-Gate Hf-In-Zn-O Thin-Film Transistors Under Illumination

Hafnium indium zinc oxide thin-film transistors (TFTs) with a double-gate structure were evaluated for the first time. Compared with devices with a single bottom gate, TFTs with an additional top gate exhibit improved subthreshold swing, threshold voltage, and field-effect mobility, as well as small...

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Veröffentlicht in:IEEE electron device letters 2010-09, Vol.31 (9), p.960-962
Hauptverfasser: Park, Joon Seok, Son, Kyoung Seok, Kim, Tae Sang, Jung, Ji Sim, Lee, Kwang-Hee, Maeng, Wan-Joo, Kim, Hyun-Suk, Kim, Eok Su, Park, Kyung-Bae, Seon, Jong-Baek, Kwon, Jang-Yeon, Ryu, Myung Kwan, Lee, Sangyun
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Sprache:eng
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Zusammenfassung:Hafnium indium zinc oxide thin-film transistors (TFTs) with a double-gate structure were evaluated for the first time. Compared with devices with a single bottom gate, TFTs with an additional top gate exhibit improved subthreshold swing, threshold voltage, and field-effect mobility, as well as smaller subthreshold currents upon exposure to visible light. This phenomenon is attributed to the more effective suppression of excess photocurrents by the application of a double-gate structure. Negative-bias stress experiments under illumination indicate that the double-gate TFT exhibits very high stability compared with the device with a single-gate configuration.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2010.2051407