Thickness dependence of strain and in-plane dielectric properties of highly (001) oriented (Ba,Sr)TiO3 thin films

Highly (001) oriented (Ba,Sr)TiO3 thin films, grown on (001) LaAlO3 substrates by pulsed laser deposition, exhibit strong variation of strain over the thickness range of 20-800nm. The tensile elastic residual strain reaches a minimum value at a thickness of 250nm, while the inhomogeneous strain decr...

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Veröffentlicht in:	Thin solid films 2010-08, Vol.518 (21), p.5928-5931
Hauptverfasser:	Lu, Shengbo, Xu, Zhenkui, Zhai, Jiwei
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Dielectric constant Dielectric properties Elastic constants Exact sciences and technology Film thickness Laser deposition Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Pulsed laser deposition Strain Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Thin films
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Beschreibung
Zusammenfassung:	Highly (001) oriented (Ba,Sr)TiO3 thin films, grown on (001) LaAlO3 substrates by pulsed laser deposition, exhibit strong variation of strain over the thickness range of 20-800nm. The tensile elastic residual strain reaches a minimum value at a thickness of 250nm, while the inhomogeneous strain decreases gradually with increasing film thickness. The 250-nm-thick film has the largest in-plane dielectric constant due to a smallest tensile elastic strain in the film and the largest in-plane tunability of 40% is achieved in the thickest film.
ISSN:	0040-6090 1879-2731
DOI:	10.1016/j.tsf.2010.05.091