Multi-orientation patterned deposition of BaTiO3 thin films using an Au buffer layer
The control of crystallographic orientation for ferroelectric oxide thin films grown on single crystal substrates has been investigated. We find that perovskite BaTiO3 has unusual orientation distributions when deposited on (100)- and (110)-oriented SrTiO3 single crystal substrates that have predepo...
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Veröffentlicht in: | Thin solid films 2010-08, Vol.518 (20), p.5806-5809 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The control of crystallographic orientation for ferroelectric oxide thin films grown on single crystal substrates has been investigated. We find that perovskite BaTiO3 has unusual orientation distributions when deposited on (100)- and (110)-oriented SrTiO3 single crystal substrates that have predeposited patterned Au regions. BTO areas deposited on gold islands were found to have a (111) orientation, whereas those deposited directly on STO had the same orientation as the substrate. Based on this method, we can select, locate, and pattern an oxide film to have different orientation distributions, and thereby engineer films with the complete property anisotropy in-plane. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/j.tsf.2010.05.108 |