Substrate-Au catalyst influence on the growth of ZnO nanorods

In this work, the evolution of the Au assisted-growth of ZnO nanorods deposited by vapour phase deposition both on sapphire and on indium–tin–oxide on glass (ITO-glass) substrates has been studied. Our investigation demonstrates that the growth proceeds first as a 3D growth, giving rise to a buffer layer, few microns thick, formed by ZnO grains with different orientation. Then a 1D transition occurs with the nucleation of a dense array of vertically aligned nanorods. A different degree of crystalline order and nanorods alignment was found between the samples grown on ITO-glass and sapphire substrates, which was ascribed to the different morphology that the Au seed layer acquires on the two different substrates. A semi-quantitative analysis of the ZnO crystalline orientation was carried out by X-ray diffraction (XRD) measurements performed at fixed incidence configuration and supported by high resolution scanning electron microscopy (HR-SEM) investigations on focused ion beam (FIB) prepared cross-sections.