Energy selective scanning electron microscopy to reduce the effect of contamination layers on scanning electron microscope dopant mapping
We demonstrate that energy selective scanning electron microscopy can lead to substantial dopant contrast and resolution improvements (compared to standard SEM) when the energy selection is carried out based on Monte Carlo modelled secondary electron spectra in combination with detector transfer mod...
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| Veröffentlicht in: | Ultramicroscopy 2010-08, Vol.110 (9), p.1185-1191 |
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| container_title | Ultramicroscopy |
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| creator | Rodenburg, C. Jepson, M.A.E. Bosch, E.G.T. Dapor, M. |
| description | We demonstrate that energy selective scanning electron microscopy can lead to substantial dopant contrast and resolution improvements (compared to standard SEM) when the energy selection is carried out based on Monte Carlo modelled secondary electron spectra in combination with detector transfer modelling. |
| doi_str_mv | 10.1016/j.ultramic.2010.04.008 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 0304-3991 |
| ispartof | Ultramicroscopy, 2010-08, Vol.110 (9), p.1185-1191 |
| issn | 0304-3991 1879-2723 |
| language | eng |
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| source | Elsevier ScienceDirect Journals |
| subjects | Computer simulation Contamination Detector transfer modelling Dopant mapping Dopants Energy selective SEM Monte Carlo methods Scanning electron microscopy Silicon Spectra |
| title | Energy selective scanning electron microscopy to reduce the effect of contamination layers on scanning electron microscope dopant mapping |
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