Energy selective scanning electron microscopy to reduce the effect of contamination layers on scanning electron microscope dopant mapping

We demonstrate that energy selective scanning electron microscopy can lead to substantial dopant contrast and resolution improvements (compared to standard SEM) when the energy selection is carried out based on Monte Carlo modelled secondary electron spectra in combination with detector transfer mod...

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Veröffentlicht in:	Ultramicroscopy 2010-08, Vol.110 (9), p.1185-1191
Hauptverfasser:	Rodenburg, C., Jepson, M.A.E., Bosch, E.G.T., Dapor, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Computer simulation Contamination Detector transfer modelling Dopant mapping Dopants Energy selective SEM Monte Carlo methods Scanning electron microscopy Silicon Spectra
Online-Zugang:	Volltext
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Beschreibung
Zusammenfassung:	We demonstrate that energy selective scanning electron microscopy can lead to substantial dopant contrast and resolution improvements (compared to standard SEM) when the energy selection is carried out based on Monte Carlo modelled secondary electron spectra in combination with detector transfer modelling.
ISSN:	0304-3991 1879-2723
DOI:	10.1016/j.ultramic.2010.04.008