Synthesis and characterization of cubic BC2N grown by reactive laser ablation

Cubic boron-carbon-nitrogen c-BC2N films were synthesized in a laser ablation system using a target of B4C with 99.99% of purity and silicon substrates (111). The discharge atmosphere for the films growth was a CH4 +N2 mixture. The substrate temperature increased from room temperature to 650A degree C. The chemical composition and bonding configuration were studied by X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES), finding B-N, B-C and C-C bonds. Moreover, the crystallographic microstructure was analyzed by means of X ray diffraction (XRD) and transmission electron microscopy (TEM), showing the presence of (111), (200) and (220) planes belonging to a diamond like cubic structure. Finally, an increase in the coating hardness as a function of the substrate temperature was observed, especially for temperatures higher than 530A degree C.