Growth of b-axis oriented VO2 thin films on glass substrates using ZnO buffer layer

VO2 thin films are grown on glass substrates by pulsed laser deposition using vanadium metal as a target. In this study, a ZnO thin film was used as a buffer layer for the growth of VO2 thin films on glass substrates. X-ray diffraction studies showed that the VO2 thin film had b-axis preferential or...

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Veröffentlicht in:Applied surface science 2010-09, Vol.256 (22), p.6834-6837
Hauptverfasser: CHIU, Te-Wei, TONOOKA, Kazuhiko, KIKUCHI, Naoto
Format: Artikel
Sprache:eng
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Zusammenfassung:VO2 thin films are grown on glass substrates by pulsed laser deposition using vanadium metal as a target. In this study, a ZnO thin film was used as a buffer layer for the growth of VO2 thin films on glass substrates. X-ray diffraction studies showed that the VO2 thin film had b-axis preferential orientation on a c-axis oriented ZnO buffer layer. The thickness of the ZnO buffer layer and the oxygen pressure during VO2 deposition were optimized to grow highly b-axis oriented VO2 thin films. The metal-insulator transition properties of the VO2 film samples were investigated in terms of infrared reflectance and electrical resistance with varying temperatures.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2010.04.097