Tolerances in microlens fabrication by multilevel etching and mass-transport smoothing
A method is developed for the quantitative assessment of microlens deficiencies caused by inaccuracies in the multistep mesa fabrication or by incomplete mass-transport smoothing. Analytical expressions are obtained and tolerable imperfections are deduced for the practical effort-saving fabrication...
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| Veröffentlicht in: | Applied Optics 1994-11, Vol.33 (31), p.7371-7376 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A method is developed for the quantitative assessment of microlens deficiencies caused by inaccuracies in the multistep mesa fabrication or by incomplete mass-transport smoothing. Analytical expressions are obtained and tolerable imperfections are deduced for the practical effort-saving fabrication of highperformance micro-optical elements. |
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| ISSN: | 1559-128X 0003-6935 1539-4522 |
| DOI: | 10.1364/AO.33.007371 |