Label-free optical biosensing using a horizontal air-slot SiNx microdisk resonator

We demonstrate label-free optical biosensing using a horizontal air-slotted silicon-rich silicon nitride (SiNx) microdisk resonator. Due to the strong confinement of light in the air-slot, a large resonance shift of 6.2 nm is observed upon reaction of the biotin-functionalized disk with a streptavidin solution with concentration of 2.5 μg/ml. Assuming a linear relationship between resonance shift and streptavidin concentration, we estimate the sensitivity to be 2.5 ± 0.2 nm/(μg/ml). Comparing this value with surface sensitivity of 5.7 nm/nm calculated using FDTD simulations, a detection limit of 30 ± 2 ng/ml, is extrapolated.