Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption

This paper presents the analysis of fluctuations of both the number and the mass of particles adsorbed on the surface of MEMS/NEMS structures, as well as the fluctuations of the micro/nanostructure resonant frequency, in the case of adsorption in the arbitrary number of layers. The presented theory...

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Veröffentlicht in:	Microelectronic engineering 2010-05, Vol.87 (5), p.1181-1184
Hauptverfasser:	DJURIC, Zoran G, JOKIC, Ivana M, DJUKIC, Maja M, FRANTLOVIC, Miloš P
Format:	Artikel
Sprache:	eng
Schlagworte:	Adsorption Adsorption–desorption noise Applied sciences Condensed matter: structure, mechanical and thermal properties Electronics Exact sciences and technology Fluctuation General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties MEMS/NEMS resonant structures MEMS/NEMS sensors Micro- and nanoelectromechanical devices (mems/nems) Microelectromechanical systems Monolayers Multilayer adsorption Multilayers Nanoelectromechanical systems Physics Resonant frequencies Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Solid surfaces and solid-solid interfaces Surface chemistry Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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Beschreibung
Zusammenfassung:	This paper presents the analysis of fluctuations of both the number and the mass of particles adsorbed on the surface of MEMS/NEMS structures, as well as the fluctuations of the micro/nanostructure resonant frequency, in the case of adsorption in the arbitrary number of layers. The presented theory shows that the fluctuations, calculated assuming multilayer adsorption, are higher than those obtained by using a monolayer (Langmuir) model. Since the multilayer adsorption is more realistic case than the monolayer adsorption, this theory enables a more accurate estimation of both AD noise and the minimal detectable signal of a MEMS/NEMS sensor.
ISSN:	0167-9317 1873-5568
DOI:	10.1016/j.mee.2009.12.039