Two-dimension fiber optic sensor for high-resolution and long-range linear measurements

A fiber optic sensor for two-dimension linear displacement measurements is described. This sensor can have resolution and range in nanometer and millimeter scales, respectively. After validation of the sensor principle in one dimension, the displacement methods in two dimensions are described and th...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2010-03, Vol.158 (1), p.43-50
Hauptverfasser:	Khiat, A., Lamarque, F., Prelle, C., Pouille, Ph, Leester-Schädel, M., Büttgenbach, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators Dimensional measurements Displacement Displacement measurement Displacement strategies Fiber optic Fiber optics High-resolution sensor Integration in mechanical systems Long-range displacement sensor Optical fibers Sensors Silicon grating microfabrication Two dimensional Two dimensions measurement
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Beschreibung
Zusammenfassung:	A fiber optic sensor for two-dimension linear displacement measurements is described. This sensor can have resolution and range in nanometer and millimeter scales, respectively. After validation of the sensor principle in one dimension, the displacement methods in two dimensions are described and the experimental measurements are realized by the use of the sensor and high precision actuators. The best and the worst displacement cases are realized with measured limits of resolution of 27.4 nm and 38.7 nm in the range of 8.67 mm and 13.03 mm, respectively.
ISSN:	0924-4247 1873-3069
DOI:	10.1016/j.sna.2009.12.029