Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis

Properties of Nanosize Aluminum Nitride Powders Synthesized by Chemical Vapor Synthesis

AlN powders by the chemical vapor synthesis (CVS) process in the AlCl3-NH3-N2-H2 system were successfully synthesized. Gasified AlCl3 as a starting material was generated by pre-heating system and transported to the tube furnace in NH3-N2-H2 atmosphere. High crystalline AlN was synthesized at over 9...

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Veröffentlicht in:Key engineering materials 2010-01, Vol.434-435, p.830-833
Hauptverfasser: Cho, Woo Seok, Pee, Jae Hwan, Park, Jong Chul, Kim, Soo Ryong, Hwang, Kwang Taek
Format: Artikel
Sprache:eng
Schlagworte:
Aluminum nitride
Atmospheres
Chemical vapor synthesis
Crystal structure
Gasified
Nanocomposites
Nanomaterials
Nanostructure
Oxygen content
Particle size
Synthesis
Tube furnaces
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Zusammenfassung:AlN powders by the chemical vapor synthesis (CVS) process in the AlCl3-NH3-N2-H2 system were successfully synthesized. Gasified AlCl3 as a starting material was generated by pre-heating system and transported to the tube furnace in NH3-N2-H2 atmosphere. High crystalline AlN was synthesized at over 900°C. The average particle size of spherical AlN powders decreased from 250 to 40nm with increasing the reaction temperature of the tube furnace. Porous nano-size particles synthesized at high reaction temperature have low oxygen contents.
ISSN:1013-9826
1662-9795
1662-9795
DOI:10.4028/www.scientific.net/KEM.434-435.830